The offending clicks can be seen clearly when zooming in on the waveform. The nice sinusoidal audio waveform has several samples of glitches/corruption around the clicks. The glitches occur simultaneously on both channels. Doesn't appear to be clipping. It looks like some bits are getting lost in the sample.
Just checking on your setup ... I'm assuming the recorded audio is via an analog input on the MOTU (i.e. not, bounced soft synth samples). Given that assumption, many of the above suggestions seem like a good place to start. But, looks like you've tried some of those already.
Another thing to check is the MOTU clock source. Perhaps that changed somehow. For my RME, this setting is located under the SONAR Preferences>Audio Driver Settings and pressing the "ASIO Panel" button. If there's not external HW clocking, the clock source should usually be set to "Internal".
Maybe my first paragraph will help someone recognize the problem. As you say, it might be the MOTU unit.
P.S. 'jpeterson' posted similar info about the audio waveform glitches a few minutes before my post.